FIELD: microelectronics. SUBSTANCE: method permits usage of high-expensive and difficultly available materials to be essentially reduced owing to possible use of targets wherein only working atomizing part is made of special-purity aluminium, the remaining, repeatedly used part being made of high-purity aluminium containing specified amounts of admixtures. When preparing the target, consumable part is pressed in into a recess made in reusable support at 330-450 C. EFFECT: reduced cost. 1 dwg
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