PROCESS OF PRODUCTION OF NANOSTRUCTURES Russian patent published in 1998 - IPC

FIELD: nanostructure production. SUBSTANCE: invention refers to technology of production of nanostructures based on compounds A₂B₆ intended for manufacture of photosensitive nanoelectronic devices. Process of production of nanostructure based on compounds A₂B₆, includes implantation of particles of nanometric range of mentioned compound into porous dielectric substrate. But first external and internal surfaces of substrate are cleaned to monatomic level, then transition layer of atoms of compound A₂B₆ with stoichiometry providing for volumetric-structural correspondence of crystalline lattices on separation boundary is formed by method of molecular deposition. After this layer of compound A₂B₆ with volume of substance in each pair not less than volume of two elementary cells in crystalline lattice of compound is grown on surface of transition layer. Finally passivation of external surface of substrate is conducted. EFFECT: increased productivity of process.