PROCESS OF TIMELY TEST OF ROUGHNESS OF SUPERSMOOTH LARGE- SIZED SURFACES BY METHOD OF X-RAY SCANNING AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 1999 - IPC

FIELD: tests of supersmooth surfaces with nanometric level of roughness. SUBSTANCE: process includes direction on to examined surface of collimated beam of X-ray radiation at sliding angle θ = θ_c÷(θ_c+0,4^o), where θ_c - is critical angle, scanning of examined surface with beam of X-ray radiation, measurement of intensity of reflected radiation by means of strip of photodiodes and determination of value of roughness by measured parameters. Device testing roughness incorporates X-ray radiation source with collimator, scanning platform to position sample with examined surface and strip of photodiodes to measure intensity of X-ray radiation reflected from examined surface. X-ray radiation source with collimator is so installed with regard to examined surface that it ensures sliding angle of θ = θ_c÷(θ_c+0,4^o) of collimated X-ray radiation, where θ_c - is critical angle. Invention makes it feasible to increase area examined by one measurement to 10⁴ mm² sq.mm and to improve spatial resolving power to value of the order of 1 mm. EFFECT: increased examined area and improved resolving power. 13 cl, 12 dwg