METHOD FOR GROWING SILICON MONO-CRYSTAL FROM MELT Russian patent published in 2004 - IPC

Abstract RU 2241078 C1

FIELD: electronics.

SUBSTANCE: method for growing silicon crystal having d diameter from melt includes forming at remaining pressure in well of 50-150 mmHg of gas flow above melt being in crucible in presence of gas-directing cylindrical screen with diameter , where D - diameter of crucible mounted coaxially to mono-crystal to be grown. Gas-directing cylindrical screen is additionally provided with gas-separating ring screen with inner diameter , which is placed above gas-directing cylindrical screen coaxially to it. Gas-directing cylindrical screen is mounted and supported at height from melt surface.

EFFECT: simplified method, lower production costs.

1 dwg, 1 ex

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RU 2 241 078 C1

Authors

Alekseev S.V.

Makeev Kh.I.

Makeev M.Kh.

Dates

2004-11-27Published

2003-06-17Filed