FIELD: electronics.
SUBSTANCE: device has chamber with apertures for evacuation of gas flow, in which crucible for melt placed on substrate on rod, upper gas-directing screen forming gas flow above melt, and heater are placed. Device is additionally provided with lower gas-directing ring screen with central aperture for moving substrate mounted above heater. Apertures for evacuation of gas flow are made in chamber body between upper and lower gas-directing screens. Space between body, lower gas-directing ring screen, heater and rod is filled with filler of, for example, silicon carbide. Heater may be made sectional. In this case filler is fixed between heater sections by compacting inserts of, for example, graphite felt. Around the rod filler may be fixed by compacting ring.
EFFECT: higher productiveness, better quality, lower costs, higher durability.
5 cl, 1 dwg
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