SEMICONDUCTOR NANO-STRUCTURE WITH COMPOSITE QUANTUM WELL Russian patent published in 2006 - IPC B82B1/00 

Abstract RU 2278072 C2

FIELD: physics of semiconductors, in particular, engineering of semiconductor nano-structures with quantum wells, possible use for realization of powerful semiconductor devices.

SUBSTANCE: semiconductor nanostructure contains quantum well with two-dimensional electron gas, made in form of layer of narrow-zoned semiconductor i-GaAs with forbidden zone Eg1 having thickness d1 and levels of dimensional quantizing Em1 - main and Ep1 - excited, sandwiched between two layers of semiconductor AlxGa1-xAs with forbidden zone Eg2>Eg1 and main level of dimensional quantizing Em2 having thickness d2 each, which is positioned between two barrier layers of wide-zoned semiconductor i-AlAs with thicknesses temperature and differentsp and forbidden zone Eg, one of which contains δ-Si layer of admixture at distance t* from hetero-boundary i-AlAs and i-AlxGa1-xAs, and second one consists of non-alloyed i-AlAs spacer and layer AlAs(Si) alloyed homogeneously by silicon and layer i-GaAs covering the nanostructure. In composite quantum well of semiconductor nanostructure, formed on poly-insulating substrate GaAs(Cr) in form of serial layers i-GaAs(buffer)/i-AlAs(δ-Si)/i-ALxGa1-xAs/i-GaAs/i-AlxGa1-xAs/i-AlAs. By special selection of parameters Eg>Eg2>Eg1 and relation d1/d2, condition Em2<Ep1 is maintained as well as localization of two-dimensional electrons with maximum in center of symmetry of composite quantum well on levels Em1 and Em2.

EFFECT: increased mobility of μt 2D electrons in quantum well with simultaneous increase of concentration nS.

4 cl, 4 dwg

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RU 2 278 072 C2

Authors

Kadushkin Vladimir Ivanovich

Dates

2006-06-20Published

2004-05-12Filed