UHF PLASMA REACTOR Russian patent published in 2007 - IPC C23C16/513 H01F41/22 

FIELD: metal processing, in particular, UHF plasma reactor, possible use in mechanical engineering and metallurgy during manufacture of products with covers produced by method of plasma steam-phased chemical sedimentation of films.

SUBSTANCE: UHF plasma generator contains axis-symmetric hermetic working chamber in form of cylinder, a platform coaxially positioned in its central part, forming radial wave guide together with internal end side of working chamber, central part of which is a resonator, UHF energy source, rectangular and cylindrical coaxial wave guides, dielectric window, hermetically separating working chamber, and cone-shaped coaxial wave guide. Base of internal cone of cone-shaped coaxial wave guide is mated with platform, base of its external cone in common plane with base of its internal cone is mated with cylindrical wall of working chamber. Dielectric window is made of dielectric transparent for UHF wave and mounted in coaxial cone-shaped wave guide coaxially with it.

EFFECT: maximal coordination of wave guiding route on the way to UHF discharge plasma, minimal energy losses in route, possible control over temperature of substrate with usage of additional energy source.

6 cl, 3 dwg