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2 315 820

(13)

(51)

IPC

C23C14/06(2006-01-01)

(21) (22)

Application

2004126418/02, 2004-08-30

(24)

Start date

2004-08-30

(22)

Actual filing date

2004-08-30

(45)

Published

2008-01-27

(72)

Inventor

Tulina Lidija IvanovnaGusev Valentin KonstantinovichPankratova Larisa Pavlovna

(73)

Holder

Rossijskaja Federatsija, Ot Imeni Kotoroj Vystupaet Gosudarstvennyj Zakazchik Federal'Noe Agentstvo Po Atomnoj EhnergiiFederal'Noe Gosudarstvennoe Unitarnoe Predprijatie Federal'Nyj Nauchno-Proizvodstvennyj Tsentr Institut Izmeritel'Nykh Sistem Im. Ju.E. Sedakova" Niiis Im. Ju.E. Sedakova")

PROCESS FOR PREPARING MULTILAYER MAGNETIC FILMS Russian patent published in 2008 - IPC C23C14/06

Abstract RU 2315820 C2

FIELD: magnetic materials technology.

SUBSTANCE: invention relates to vacuum thin film sputtering area and can be used in magnetic record systems and sensors based on magneto-resistive effect. Magnetic alloy Fe-Ni and SiO₂ are deposited layer-by-layer in vacuum under action of external magnetic field applied to precipitation plane, after which resulting structure is baked. Sputtering velocity of magnetic alloy Fe-Ni is changed from one layer to the next during one sputtering cycle.

EFFECT: enabled preparation of magnetic films with varied magnetic properties.

6 dwg

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RU 2 315 820 C2

Authors

Tulina Lidija Ivanovna

Gusev Valentin Konstantinovich

Pankratova Larisa Pavlovna

Dates

2008-01-27—Published

2004-08-30—Filed