MULTI-LAYER METALLISED COATING OF DIAMOND OR DIAMOND-CONTAINING MATERIALS AND ITEMS OUT OF THEM AND PROCEDURE FOR ITS APPLICATION Russian patent published in 2010 - IPC C23C14/34 B32B15/00 H01L23/14 

FIELD: metallurgy.

SUBSTANCE: invention refers to metallised coating of diamond and can be implemented at connecting elements of electric vacuum and solid-state items. Coating corresponds to succession of layers as titanium-iron or titanium-nickel with common thickness 0.3-0.5 mcm at ratio of components 55:45 of vol %, correspondingly, and molybdenum and tungsten of thickness 1.0-1.3 mcm. The procedure for coating application consists in processing surface in melt of alkali at temperature 250-300°C, in activation of surface by heating to temperature 750-800°C during 1-1.5 h in air medium and in successive sputtering corresponding layers onto surface. Sputtering is done by plasma-arc method in two stages. At the first stage the layer of titanium-iron or titanium-nickel with common thickness 0.3-0.5 mcm correspondingly at ratio of components 55:45 vol % correspondingly is sputtered from the first target-cathode at current 120-130 A on it during 80-100 sec. At the second stage the layer of molybdenum or tungsten of 1.0-1.3 mcm thickness is sputtered from the second target-cathode at current 200-230 A on it during 250-280 sec.

EFFECT: increased strength and reliability of coating; expanded functionality.

4 cl, 1 tbl, 14 ex