FIELD: power engineering.
SUBSTANCE: reactor comprises tight axisymmetric chamber with channels for gas and radial wave guide installed in it, central part of which is a SHF resonator, holder of substrate, collector, gas heat exchanger and toroid membrane. Gas heat exchanger comprises a cylindrical chamber installed coaxially with a substrate holder. Toroid membrane forms a U-shaped semi-wave train in section and is arranged between radial wave guide and substrate holder. Substrate holder is arranged as cylindrical, axisymmetric, massive of heat resistant and heat conductive metal. One of channels for gas is arranged as axial and is connected to cylindrical chamber of heat exchanger, and the other channel for gas - with collector. Cylindrical chamber is connected to side of specified holder, which is reverse towards substrate and SHF discharge, contacts with it on area from 30 to 90% of area of reverse side of holder, and is connected to collector by means of gap. Substrate holder is connected to radial wave guide via toroid membrane.
EFFECT: invention provides for maintenance of uniform temperature on substrate of larger area.
5 cl, 1 dwg
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