POLARISER BASED ON ARRAY OF NANOCONDUCTORS Russian patent published in 2011 - IPC G02B5/30 B82B1/00 

Abstract RU 2413255 C2

FIELD: physics.

SUBSTANCE: polariser is made using a method which involves depositing a metal layer on top of a transparent substrate and a first material to form a surface layer on top of the metal layer; inducing essentially uniform voltage aligned in a first direction in the surface layer, exposing the surface layer to a stream of ions until formation of a nanomask containing an essentially periodic array of essentially parallel elongated elements having a wavy cross section. At least some of these elements have the following structure in the cross section: an inner region made from a first material and a first outer region made from a second material which covers the a first part of the inner region. The second material is formed by modifying the first material with a stream of ions. Further, etching is carried out through the surface area and through the metal layer up to the surface of the optically transparent substrate using the nanomask to transfer the pattern of the elongated elements into the metal layer, and parts of the surface layer remaining after etching are removed from the metal layer.

EFFECT: efficient methods of forming large arrays of nanoconductors with a period of 150 nm or less.

42 cl, 10 dwg

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RU 2 413 255 C2

Authors

Smirnov Valerij K.

Kibalov Dmitrij S.

Dates

2011-02-27Published

2006-06-01Filed