FIELD: physics.
SUBSTANCE: method of making a LIGA template characterised by that the initial substrate is a disc formed from composite radiotransparent material whose central part contains a metal plate which is either made from material which is more radiotransparent than the composite material (e.g. beryllium) or is completely removed using chemical methods at the last step of making the LIGA template.
EFFECT: high contrast and radiotransparency of the LIGA template.
2 cl, 5 dwg
| Title | Year | Author | Number |
|---|---|---|---|
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|
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