X-RAY MASK AND METHOD OF ITS FABRICATION Russian patent published in 2015 - IPC G01T1/06 G03B42/02 G03C5/16 

FIELD: physics.

SUBSTANCE: invention relates to a design and a method of fabrication of X-ray masks, mainly for "soft" X-ray lithograph (where the main part of the exposing radiation is in the spectral range - λ≈2.5÷9 Ǻ). The X-ray mask contains a bearing ring, a bearing membrane attached to it with the topological X-ray absorbing drawing created on its working surface, the bearing ring contains the section of "smooth transition" made from the same material, like the bearing ring, and adjoining an internal sidewall of the bearing ring and the bearing membrane.

EFFECT: improvement of safety of the bearing membrane.

5 cl, 5 dwg