METHOD OF MAKING PHOTODETECTOR ARRAY (VERSIONS) Russian patent published in 2012 - IPC H01L31/18 

FIELD: physics.

SUBSTANCE: method of making a photodetector array involves hybridisation of a photosensitive element with the large-scale integrated circuit (LSI) of a multiplexer using indium columns, thereby forming a photodetector workpiece, and the base region of the photosensitive element is attenuated. After hybridisation of the photosensitive element with the multiplexer LSI, the obtained workpiece is attached to a fastening device consisting of a substrate and a calibration disc. First, the workpiece is attached to the substrate, and the space between the calibration disc and the workpiece, including the space between the indium columns, is then filled with a hot-melt adhesive; the side surfaces of the base region of the photosensitive element from the adhesive to the surface of the calibration disc are cleaned; the base region of the photosensitive element is attenuated; the photodetector workpiece is removed and washed from the hot-melt adhesive, including the space between the indium columns.

EFFECT: invention provides simple and reliable methods of mounting a photodetector workpiece consisting of a photosensitive element and a multiplexer LSI, for the subsequent operation of attenuating the base region of the photosensitive element to the final value.

7 cl, 15 dwg