METHOD OF MAKING COMPOSITE POLYCRYSTALLINE AND MONOCRYSTALLINE DIAMOND PLATE Russian patent published in 2013 - IPC C30B25/02 C30B29/04 C30B33/06 C23C16/27 H01L23/373 

FIELD: chemistry.

SUBSTANCE: method of making monocrystalline and polycrystalline diamond plates with a large surface area involves arranging, without touching each other, workpiece monocrystals with surface orientation (100) on a substrate holder, creating nucleation centres on the surface of the substrate holder free from the workpiece monocrystals, simultaneous chemical vapour deposition (CVD) of an epitaxial layer on the surface of workpiece monocrystals and a polycrystalline diamond film on the remaining surface of the substrate holder. As a result of chemical vapour deposition of the diamond, splicing of monocrystalline and polycrystalline diamond takes place on the side surface of the workpiece monocrystals to form a diamond plate of a large surface area, having spliced monocrystalline and polycrystalline diamonds. To obtain a plane-parallel CVD diamond plate, the grown composite diamond substrate is polished on both sides.

EFFECT: obtaining plates of monocrystalline and polycrystalline CVD diamond of a large surface area, having a common smooth outer surface.

5 cl, 7 dwg