METHOD OF ASSEMBLING SENSING ELEMENT OF MICROMECHANICAL SENSOR Russian patent published in 2014 - IPC B81C3/00 

FIELD: instrumentation.

SUBSTANCE: in the process of assembling the sensing element of micromechanical sensor the glass lining and crystal of monocrystalline silicon are combined, installed and clamped in a special device, warmed up, kept at a predetermined temperature and the required voltage is supplied. At that two glass linings and crystal of monocrystalline silicon are combined simultaneously, located between them, they are heated to a temperature of 410°C, kept for 1.5 hours, the voltage is supplied to both linings for not less than two minutes, the voltage is switched off, the polarity of the voltage is changed, the voltage is applied again and the cycle of changing polarity is repeated at least three times.

EFFECT: simplification and reduction of technological cycle of assembling sensing element of micromechanical sensor.

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