FIELD: chemistry.
SUBSTANCE: in canal matrix in addition to plate of monocrystalline silicon of hole type with opened canals and deposited material on frontal surface of this plate intermediate dielectric layer of silicon dioxide is created and metal film is applied on the frontal surface of plate with opened canals which have specified diametrical dimension.
EFFECT: improvement of exploitation characteristics by introduction of electrodes and application of electrokinetic and electrophysiological control, which makes it possible to extend nomenclature of membrane equipment products based on biocompatible and highly technological silicon.
8 cl, 8 dwg
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