FIELD: electricity.
SUBSTANCE: manufacturing method of a semiconductor instrument involves application of an epitaxial layer, formation of areas of an emitter, a collector and a base that is shaped by alloying with carbon with concentration of 2.1-2.4·1019 cm-3 with further annealing at the temperature of 500-550°C during 50-60 s.
EFFECT: providing a possibility of reducing density of defects; improving parameters, quality and increasing percentage of yield.
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Authors
Dates
2015-07-20—Published
2014-02-25—Filed