DEVICE FOR SYNTHESIS OF COATINGS ON DIELECTRIC PRODUCTS Russian patent published in 2018 - IPC H01J27/04 

FIELD: technological processes.

SUBSTANCE: invention relates to a device for the synthesis of coatings on dielectric products. Device comprises a working chamber, a device for planetary rotation of articles, mounted inside the chamber with the formation of a zone of rotation of articles, a target of planar magnetrons on the walls of the chamber, their power supplies connected by negative poles to targets, and positive poles to the camera, further comprises a hollow cylindrical conductive grid insulated from the chamber and mounted inside the rotation zone of the products, bounded at the ends by disks of electrically conductive material, and a source of high-voltage pulses, a positive pole connected to the chamber, and a negative pole connected to the grid.

EFFECT: technical result is an increase in the adhesion and quality of the coating to be synthesized.

1 cl, 2 dwg