FIELD: measuring equipment.
SUBSTANCE: invention relates to measurement equipment and can be used for temperature compensation in CMUT devices. CMUT devices are used in many applications, for example, for ultrasound imaging and pressure measurement. Said devices operate by sensing a change in capacitance caused by deflection of a membrane (32) comprising one of a pair of electrodes in device by ultrasound exposure of, or pressure applied on, membrane. CMUT device may be susceptible to effects of changing temperature.
EFFECT: technical result is improved accuracy of obtained data.
16 cl, 14 dwg
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