METHOD OF LASER DRILLING OF THROUGH HOLES IN NON-METALLIC PLATE Russian patent published in 2018 - IPC B23K26/382 H01L21/42 

FIELD: electricity.

SUBSTANCE: laser beam is divided into two beams and the both sides of the plate are affected by beams of equal energy density. The energy density is calculated from the ratio connecting the specific sublimation energy of Q material, the reflection coefficient of the R plate material, and the material χ absorption coefficient at the wavelength of the affecting laser radiation. First, the laser beam is applied to on one plate surface with energy density, determined by the following ratio of and both sides of the plate are exposed to the energy density, different from the energy density value of the previous exposure. This energy density is determined from the following relation where e is the base of the natural logarithm; h is the thickness of the plate, aχh>3.87.

EFFECT: reduction of energy costs of laser drilling of through holes in plates of non-metallic materials.

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