METHOD OF LASER PIERCING THROUGH HOLE IN NON-METAL PLATE Russian patent published in 2019 - IPC B23K26/382 H01L21/42 

Abstract RU 2688036 C1

FIELD: manufacturing technology.

SUBSTANCE: invention relates to laser punching of through holes in plates of semiconductor, ceramic and vitreous materials. Laser beam is divided into two. Plates are exposed on both sides of the plate with equal density of energy, which is calculated from ratio connecting specific energy of sublimation of material Q, reflection coefficient of material of plate R and the material X absorption coefficient at the wavelength of the acting laser radiation, first act on both sides of the plate with a beam with one energy density, and then on the other.

EFFECT: reduced power consumption during laser piercing of through holes in plates out of nonmetallic materials.

1 cl, 2 dwg

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RU 2 688 036 C1

Authors

Kovalenko Aleksandr Fedorovich

Dates

2019-05-17Published

2018-10-25Filed