METHOD FOR MAKING DIODES FOR MIDDLE-WAVE IR RANGE OF SPECTRUM Russian patent published in 2018 - IPC H01L31/18 

Abstract RU 2647978 C2

FIELD: electrical engineering; optics.

SUBSTANCE: invention relates to optoelectronic technology, namely to semiconductor devices intended for detecting and emitting infrared (IR) radiation at room temperature. Method for manufacturing diodes for the medium-wave infrared spectrum includes growing semiconductor layers, at least one of which absorbs/emits photons with an energy of 0.2–0.6 eV, carrying out photolithography and deposition on the semiconductor layers of n- and p-type sequences of metallic contact layers of a given geometry, At least one of which contains a noble metal and impurities, and at least one of which contains nickel and impurities, the ignition of contact layers at a temperature of 310–400 °C. In this case, the said sputtering on the p-type conductivity layer begins with the deposition of an alloy containing silver (80–97)% by mass and manganese (3–20) by weight, then a layer containing nickel and impurities and a gold layer with impurities are subsequently sprayed.

EFFECT: method for production of diodes for medium-wave IR spectrum is proposed.

8 cl, 5 dwg, 3 tbl

Similar patents RU2647978C2

Title Year Author Number
METHOD OF PRODUCING DIODES OF MEDIUM-WAVE INFRARED SPECTRUM 2012
  • Il`Inskaya Natal`Ya Dmitrievna
  • Matveev Boris Anatolievich
  • Remennyy Maksim Anatolievich
  • Usikova Anna Aleksandrovna
RU2599905C2
METHOD FOR MANUFACTURING PHOTODIODES OF THE MEDIUM-WAVE IR SPECTRAL RANGE 2019
  • Matveev Boris Anatolievich
  • Remennyi Maksim Anatolievich
RU2726903C1
METHOD OF PRODUCING DIODES OF MEDIUM-WAVE INFRARED SPECTRUM 2016
  • Il'Inskaya Natal'Ya Dmitrievna
  • Matveev Boris Anatolievich
  • Remennyy Maksim Anatolievich
  • Usikova Anna Aleksandrovna
RU2647979C1
PHOTODIODE FOR MEDIUM-WAVE INFRARED RADIATION 2016
  • Lavrov Albert Anatolievich
  • Matveev Boris Anatolievich
  • Remennyi Maksim Anatolievich
RU2647980C2
MEDIUM-WAVE INFRARED SEMICONDUCTOR DIODE 2011
  • Il'Inskaja Natal'Ja Dmitrievna
  • Matveev Boris Anatol'Evich
  • Remennyj Maksim Anatol'Evich
RU2570603C2
MULTI-CHANNEL INFRARED PHOTORECEIVING MODULE 2014
  • Matveev Boris Anatolevich
  • Remennyj Maksim Anatolevich
RU2647977C2
SEMICONDUCTOR PHOTODIODE FOR INFRARED RADIATION 2011
  • Andreev Igor' Anatol'Evich
  • Il'Inskaja Natal'Ja Dmitrievna
  • Serebrennikova Ol'Ga Jur'Evna
  • Sokolovskij Grigorij Semenovich
  • Kunitsyna Ekaterina Vadimovna
  • Djudelev Vladislav Viktorovich
  • Jakovlev Jurij Pavlovich
RU2469438C1
SEMICONDUCTOR INFRARED PHOTODIODE 2011
  • Matveev Boris Anatol'Evich
RU2521156C2
SEMICONDUCTOR INFRARED DETECTOR 2012
  • Grebenshchikova Elena Aleksandrovna
  • Sherstnev Viktor Veniaminovich
  • Starostenko Dmitrij Andreevich
  • Kunitsyna Ekaterina Vadimovna
  • Konovalov Gleb Georgievich
  • Andreev Igor' Anatol'Evich
  • Jakovlev Jurij Pavlovich
RU2488916C1
SEMICONDUCTOR DIODE FOR IR SPECTRAL RANGE 2002
  • Matveev Boris Anatol'Evich
RU2286618C2

RU 2 647 978 C2

Authors

Il'Inskaya Natal'Ya Dmitrievna

Ivanova Ol'Ga Veniaminovna

Matveev Boris Anatolievich

Remennyy Maksim Anatolievich

Usikova Anna Aleksandrovna

Dates

2018-03-21Published

2015-01-27Filed