METHOD FOR DEPOSITION OF DIAMOND FILMS FROM THE THERMALLY ACTIVATED MIXTURE OF GASES AND THE REACTOR FOR ITS IMPLEMENTATION Russian patent published in 2018 - IPC C23C16/27 C23C16/455 C23C16/54 

FIELD: chemistry.

SUBSTANCE: invention relates to the production of artificial diamonds by the method of chemical gas-phase deposition, in particular, is associated with the activation of the flow of a mixture of neutral gases with heated metallic surfaces and can be used in electronics, instrument-making, in factories producing diamond tools. Method for depositing diamond films from a thermally activated gas mixture comprises activating a gas mixture, containing hydrogen and methane, by means of a metal activator, and depositing the film on the heated substrate. Activation of said gas mixture is carried out in a metal activator, consisting of a copper water-cooled shell polished from within and tubes installed to form two coaxial cylindrical channels. Inner cylindrical channel is formed by the walls of a metal tube and a quartz tube, the outer cylindrical channel is formed by the walls of an ohmically heated tube made of a refractory metal, and a molybdenum tube installed with a ceramic insulator in said housing. Space between the tubes forming the outer cylindrical channel and the body of the metal activator are fed with argon, in the space between the tubes forming the inner and outer cylindrical channels, hydrogen is supplied, and a mixture of hydrogen and methane is fed through the tubes forming the inner cylindrical channel. Activation of said mixture is carried out by heating the wall of an outer cylindrical channel formed by said ohmically heated tube. Reactor for depositing diamond films from a thermally activated gas mixture comprises a vacuum chamber and a metal activator and a substrate holder disposed therein. Metal activator consists of a copper water cooled body, the inner surface of which is polished, and tubes installed to form two coaxial cylindrical channels. Inner cylindrical channel is formed by the walls of a metal tube and a quartz tube, the outer cylindrical channel is formed by the walls of an ohmically heated tube made of a refractory metal, and a molybdenum tube installed with a ceramic insulator in the copper casing of the activator.

EFFECT: it is possible to provide a method and apparatus for depositing diamond films from a thermally activated gas mixture that provides a high deposition rate, high quality of the resulting diamond films, and a maximum reduction in heat loss.

2 cl, 1 dwg, 1 ex