INGAAS-BASED MATERIAL ON INP SUBSTRATES FOR PHOTO-CONDUCTING ANTENNAS Russian patent published in 2018 - IPC H01L33/30 

Abstract RU 2657306 C2

FIELD: radio engineering, communication.

SUBSTANCE: material comprises a LT-InGaAs film epitaxially grown at a reduced temperature on an InP substrate, characterised in that an InP substrate is used with a crystallographic orientation (n11) A, where n = 1, 2, 3…; the LT-InGaAs film is doped with impurities by amphoteric properties (for example, silicon); the ratio of arsenic fluxes and group III elements (gallium and indium) is chosen such that the grown LT-InGaAs film had a hole type of conductivity.

EFFECT: providing the possibility of simplifying the technological process and controlling the range of generation and reception of radiation.

2 dwg

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RU 2 657 306 C2

Authors

Galiev Galib Barievich

Klimov Evgenij Aleksandrovich

Klochkov Aleksej Nikolaevich

Maltsev Petr Pavlovich

Pushkarev Sergej Sergeevich

Kitaeva Galiya Khasanovna

Dates

2018-06-13Published

2016-10-07Filed