FIELD: electrical engineering.
SUBSTANCE: invention can be used for generation or detection of terahertz range electromagnetic waves. Essence of invention consists in fact, that manufacturing of photoconductive antenna for generation or detection of electromagnetic waves of terahertz range consists in application of dielectric layer on surface of photoconductive layer, application of photoresist and subsequent formation of mask of windows in dielectric, liquid etching of windows by mask, application of photoresist and formation of mask for metallization of antenna, thermal deposition of photoconductive antenna metallization with subsequent removal of metal residues by "explosion" method, wherein photoconductive antenna metallization is applied on dielectric layer, which is coated with photoconductive layer surface, and the electrical contact of metallization with the semiconductor is carried out through the pre-opened windows in the dielectric layer.
EFFECT: technical result is enabling possibility of increasing signal-to-noise ratio and efficiency of optical-terahertz antenna conversion.
1 cl, 2 dwg
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