FIELD: chemistry.
SUBSTANCE: invention relates to a device for producing a composite film of a multielement alloy. Device comprises a heating system, an air supply system, a cooling system, a vacuum system, a vacuum chamber, a holder, a lifting mechanism, a crucible evaporation source, a magnetron sputtering source, a source of cathode arc and an electrical control system. Device provides a composite multi-element alloy film by combining ion deposition using a cathode arc and magnetron sputtering, and using a dual evaporation source combining vacuum evaporation and magnetron sputtering.
EFFECT: device allows to control the internal structure of all types of films and to obtain multi-element film with outstanding common properties, such as high hardness, low internal stress, high adhesive strength, low roughness and favorable wear resistance, as well as obtaining a film with a high deposition rate.
5 cl, 18 dwg
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