METHOD OF CULTIVATION OF EPITAXIAL FILMS OF EUROPIUM MONOXIDE ON GRAPHENE (OPTIONS) Russian patent published in 2019 - IPC C23C14/08 C23C14/22 H01L21/20 

FIELD: manufacturing technology.

SUBSTANCE: invention relates to the methods for producing epitaxial thin-film materials, namely films of europium monoxide on graphene, and it can be used to create such spintronics devices as a spin transistor and an injector of spin-polarized carriers. Method of growing europium monoxide EuO epitaxial films on graphene involves the formation of a europium submonolayer with a surface phase (√3 × √3) by molecular beam epitaxy on the surface of a preformed graphene monolayer structure/substrate at the substrate temperature T_s=20–100 °C and pressure of the flow of atoms of europium P_Eu=(1⋅10^-8–1⋅10^-7) Torr, deposition of a layer of europium monoxide EuO at the temperature of the substrate T_s=20–100 °C, pressure of oxygen flow P_O2=(1⋅10^-9–1⋅10^-8) Torr and pressure flux of europium atoms P_Eu=(1⋅10^-8–1⋅10^-7) Torr, satisfying condition 10⋅P_O2≤P_Eu≤11⋅P_O2, to achieve the required layer thickness of europium monoxide EuO. In one of the embodiments of the invention after the above operations, a layer of europium monoxide EuO is deposited at the temperature of the substrate T_s=340–420 °C, oxygen flow pressure P_O2=(1⋅10^-9–1⋅10^-8A) Torr and pressure flux of europium atoms P_Eu=(1⋅10^-8–1.5⋅10^-7A) Torr satisfying condition 10⋅P_O2≤P_Eu≤15⋅P_O2, to achieve the required total thickness of the layer of europium monoxide EuO. In particular cases of carrying out the invention after deposition of a film of europium monoxide, it is annealed in vacuum within the temperature range of T_s=490–520 °C.

EFFECT: formation of epitaxial stoichiometric films of europium monoxide with the thickness of more than 5 nm with high crystalline perfection without inclusions of phases of higher oxides on graphene is obtained, which allows to obtain magnetic states in graphene to create such technical devices as a single-electron transistor and a spin filter.

4 cl, 4 dwg, 4 ex