METHOD TO INCREASE ACCURACY OF DOCKING QUALITY CONTROL Russian patent published in 2019 - IPC H01L21/66 H01L23/544 G01B11/14 

FIELD: physics.

SUBSTANCE: invention can be used for hybridization of photodetector arrays by inverted mounting. Method for improving accuracy of quality control of docking of LSI reading and matrix of photosensitive elements (MPSE) involves installation of a docked module in a holder at a small angle to the optical axis of the lens of the microscope, that the field of view of the microscope has a focused real image of the edge of the MPSE and an imaginary image of the same edge of the MPSE, which is mirrored from the plane of the LSI readout. Each measurement of gaps is carried out at points marked by metalized marks formed on the surface of the crystal of the LSI reading so that images of the gap and marks are simultaneously observed in the field of view of the microscope.

EFFECT: high accuracy of measuring the value of gaps between crystals by making each measurement of gaps at points marked by metal-coated marks.

1 cl, 3 dwg