METHOD FOR MAKING INJECTION MOULD INSERT OR CASTING MOULD Russian patent published in 2020 - IPC C23C14/04 

FIELD: technological processes.

SUBSTANCE: invention relates to production of mould insert or casting mould and can be used in mass production of microfluid biochips from polymer materials by stamping or casting. Proposed method comprises preparing plane-parallel metal billet of insert with polished working surface, forming on it by means of lithography topological masking layer, subsequent plasma-chemical etching and removing masking layer after plasma chemical etching operation at last stage of relief formation. Masking layer is made of aluminium, wherein plasma-chemical etching of metal of workpiece of said insert is more than a hundred times faster compared to etching rate of masking layer. Formation by means of lithography of aluminium masking layer and subsequent plasma-chemical etching through said masking layer of metal of said insert is performed with required number of iterations to form multilevel relief. In particular cases of the invention implementation, metal adhesion sublayers are applied on the polished working surface of the plane-parallel metal workpiece of the insert before application of the masking layer by magnetron sputtering. Residues of the aluminium masking layer are left to the end of manufacture of relief of the billet blank. An anti-corrosion or anti-adhesion coating is applied on the formed relief to improve operational characteristics of the manufactured insert. At the second and subsequent iterations after plasma-chemical etching a resistive mask is formed with allowance to avoid multiple shedding of initially formed masking metal layer.

EFFECT: possibility of multiple use of lithography for production of multi-level relief including submicron sizes.

5 cl, 3 dwg