MULTILAYER GRAPHENE-BASED HALL SENSOR Russian patent published in 2024 - IPC G01R33/07 B82B1/00 

FIELD: measuring.

SUBSTANCE: invention relates to measurement equipment for measuring magnetic fields. Hall sensor based on multilayer graphene, comprising a magnetically sensitive film of multilayer graphene, placed on a substrate, two metal current-carrying and two metal measuring contacts to it. Magnetically sensitive film used is multilayer graphene, the successive layers of which are turned relative to each other through angles ranging from 10 to 50 degrees with the number of layers from 10 to 300, wherein the sensor has electron mobility in the inner layers of the multilayer graphene film of order of 50×10³ cm²/(V⋅s), metal contacts of the sensor are made from Cr/Au alloy, and the sensor is made with Hall resistance sensitivity to the magnetic field of up to 2.5 kOhm/T.

EFFECT: high sensitivity of Hall resistance to magnetic field to 2.5 kOhm/T, high sensitivity of Hall voltage at limiting current (10 mA) to 80 V/T, enabling operation at room temperature and avoiding the need to encapsulate the magnetically sensitive material.

1 cl, 3 dwg