FIELD: optics; measuring.
SUBSTANCE: invention relates to optical measurements and an autofocusing method. Method involves generating autofocusing light using a first light source of the optical system and directing the autofocusing light through the lens of the optical system onto a substrate having first and second surfaces. Autofocusing light is reflected as the first autofocusing light on the first surface and as the second autofocusing light on the second surface. First autofocusing light is directed to the sensor using the lens and the first reflecting surface and the second autofocusing light is prevented from falling on the sensor. Exciting light is generated using a second light source of the optical system and directed through the lens onto the substrate. Emitted light emitted from the sample on the substrate is directed to a sensor using an objective lens and a second reflecting surface.
EFFECT: simplified method of autofocusing.
18 cl, 61 dwg
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